정지 타겟에 대한 레이저 간섭계의 측정 정밀도 향상에 관한 연구

A Study on the Improvement of Measurement Accuracy of Laser Interferometers for a Stopped Target

An interferometer is the unique measurement device that can measure the range up to a few meters with sub-nano accuracy and this characteristic makes it as the important sensing device for the emerging nano-mechatronics technologies. The interferometer, however, is very sensitive to the environments such as temperature, humidity, sound noises, vibrations and air turbulences and these factors result in a few hundred nano meter errors. There have been many efforts to reduce these environmental errors. These efforts are mainly focused in reducing the errors inside the interferometer and improving the environments physically. The purpose of this paper is to improve accuracy of the interferometer by using measurement noise models and the Kalman filter algorithm.