Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2006.04a
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- Pages.342-344
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- 2006
Error Correction of Laser Interferometer Using Capacitive Sensor
정전용량센서를 이용한 레이저 간섭계 오차보정
Abstract
During last years, large investments have been directed to development and research of nano-technological products like semiconductor, display panel, optic-fiber communication components, life technology, and ultra-precision components. All quantitative measurements at nanometre scale should guarantees accurate results and high quality. Laser interferometer is one of most famous nanometre scale devices to be able to measure metre-scale distance with nanometre scale resolution, but it is easily affected by various error causes like geometrical, instrumental and environmental factor. On the other side, capacitive sensor is robust to above error factors, but it is able to measure relatively shorter distance, under