Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2006.11a
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- Pages.19.2-19.2
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- 2006
Development of slurry for Ru Chemical Mechanical Planarization
- Kim, In-Kwon (Hanyang Uni) ;
- Kwon, Tae-Young (Hanyang Uni) ;
- Park, Jin-Goo (Hanyang Uni) ;
- Park, Hyung-Soon (Hynix Semiconductor Inc.)
- Published : 2006.11.03