마이크로 금속 박판의 동적 물성치 측정을 위한 마이크로 동적 시험 장치 개발에 관한 연구

A Study on a micro dynamic tester development for a micro property measurement of a micro metal specimen

In a micro-unit of electronic-machine, vibration can be excited by a small impact, and this vibration acts as a fatigue load. To measure the vibration effect on the micro unit, a micro dynamic tester is needed to test a micro specimen. In this paper, it has confirmed a movement of the PZT(piezo actuator) to use a sine signal. And, it has confirmed a fracture of specimens by using a tension-tension input signal in PZT. A metal-material property in the micro scale has been tested to compare with the macro scale. A fatigue test has been conducted by using PZT actuator to give a bending-tension effect.