Design of Actuator based on Voice Coil Motor with High Speed and Long Stroke Movement for Advanced Laser Micro-Fabrication

첨단 레이저가공용 고속 장행정 이송을 위한 보이스 코일 모터 기반의 구동기 설계

In this paper, actuator based on voice coil motor is designed and estimated to check the capability whether that system is in design specification or not. Design specification is moving range as $20{\times}20mm^2$ a along XY-axis in plane and maximizes bandwidth for high speed. The type of voice coil motor is selected with regarding design specification and minimizes the size of actuator. Flux density of designed voice coil motor is simulated. And PI controller is designed to maximize bandwidth of actuator. Finally, characteristic of designed actuator is simulated and that result reveals the validity of presented design.