한국레이저가공학회:학술대회논문집 (Proceedings of the Korean Society of Laser Processing Conference)
- 한국레이저가공학회 2006년도 춘계학술발표대회 논문집
- /
- Pages.123-128
- /
- 2006
공초점 정렬을 이용한 자동초점보정 레이저 직접묘화 시스템
Auto-focusing laser direct writing system using confocal geometry
- Kim, Yong-Woo (School of Mechanical Engineering, Yonsei University) ;
- Lee, Jin-Seok (School of Mechanical Engineering, Yonsei University) ;
- Kim, Kyoung-Sik (School of Mechanical Engineering, Yonsei University) ;
- Hahn, Jae-Won (School of Mechanical Engineering, Yonsei University)
- 발행 : 2006.06.02
초록
We constructed a micro-patterning system that build patterns on a photoresist coated wafer using laser direct writing system. Confocal microscope system was adapted for real-time auto-focusing of the laser writing lens to generate lines of uniform width.