Proceedings of the Korean Society of Laser Processing Conference (한국레이저가공학회:학술대회논문집)
- 2006.06a
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- Pages.123-128
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- 2006
Auto-focusing laser direct writing system using confocal geometry
공초점 정렬을 이용한 자동초점보정 레이저 직접묘화 시스템
- Kim, Yong-Woo (School of Mechanical Engineering, Yonsei University) ;
- Lee, Jin-Seok (School of Mechanical Engineering, Yonsei University) ;
- Kim, Kyoung-Sik (School of Mechanical Engineering, Yonsei University) ;
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Hahn, Jae-Won
(School of Mechanical Engineering, Yonsei University)
- Published : 2006.06.02
Abstract
We constructed a micro-patterning system that build patterns on a photoresist coated wafer using laser direct writing system. Confocal microscope system was adapted for real-time auto-focusing of the laser writing lens to generate lines of uniform width.
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