Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2006.05a
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- Pages.27.2-27.2
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- 2006
Inductively coupled plasma reactive ion etching of ZnO using $C_2F_6$ and $BCl_3-based$ gas Plasmas
- Published : 2006.05.19