Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2006.05a
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- Pages.22.2-22.2
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- 2006
Effect of post-annealing on properties of $Ta_2O_5$ films grown by ALD
ALD로 성장시킨 $Ta_2O_5$ 박막의 열처리에 따른 특성변화
- Published : 2006.05.19