대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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- Pages.1357-1358
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- 2006
CMP 공정을 적용한 유기발광소자의 전압.전류 특성
I-V Properties OLED by CMP Process
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Choi, Gwon-Woo
(Chosun University) ;
- Lee, Woo-Sun (Chosun University) ;
- Jun, Young-Kil (Chosun University) ;
- Jueng, Pan-Gum (Chosun University) ;
- Seo, Yong-Jin (Daebul University)
- 발행 : 2006.07.12
초록
Indium tin oxide (ITO) thin film is a transparent electrode, which is widely applied to solar battery, illuminators, optical switches, liquid crystal displays (LCDs), plasma display panels (PDPs), and organic light emitting displays (OLEDs) due to its easy formation on glass substrates, goof optical transmittance, and good conductivity. ITO thin film is generally fabricated by various methods such as spray, CVD, evaporation, electron gun deposition, direct current electroplating, high frequency sputtering, and reactive DC sputtering. However, some problems such as peaks, bumps, large particles, and pin-holes on the surface of ITO thin film were reported, which caused the destruction of color quality, the reduction of device life time, and short-circuit. Chemical mechanical polishing (CMP) processis one of the suitable solutions which could solve the problems.
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