한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2005년도 춘계학술발표대회 및 제8회 신소재 심포지엄 논문개요집
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- Pages.50-50
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- 2005
STI-CMP에서 나노 세리아 슬러리에 첨가되는 계면 활성제의 농도, pH, 분자량의 영향
Effect of pH, Molecular Weight, and Concentration of Surfactant in Nano-Ceria Slurry on STI-CMP
- Lee, Jae-Seong (Department of Electronics and Computer Engineering, Hanyang University, Nano-SOI Process Laboratory, Hanyang University) ;
- Chun, Jin-Hwan (Department of Electronics and Computer Engineering, Hanyang University, Nano-SOI Process Laboratory, Hanyang University) ;
- Lee, Myung-Yoon (Nano-SOI Process Laboratory, Hanyang University) ;
- Park, Jea-Gun (Nano-SOI Process Laboratory, Hanyang University)
- 발행 : 2005.05.26