Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2005.11a
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- Pages.117-118
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- 2005
The effects of capacitor termination at an internal ICP antenna on the electric characteristic of coil, plasma parameters and sputtering of coil shielding
Capacitor termination이 내부 antenna ICP system에서 coil의 전기적 특성, plasma 변수, coil 절연 물질의 sputtering에 미치는 영향
- Published : 2005.11.04
Abstract
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