한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2005년도 제29회 학술발표회 초록집
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- Pages.159-159
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- 2005
저온 프로세스에 의한 다결정 실리콘계 박막 제작
- Choi, Byoung-Jung (Division of Electronics and Information, Chonbuk National University) ;
- Yang, Sung-Chae (Division of Electronics and Information, Chonbuk National University) ;
- Chu, Byung-Yoon (Division of Electronics and Information, Chonbuk National University) ;
- Lee, Jung-Hui (Division of Electronics and Information, Chonbuk National University) ;
- Yatsui, Kiyoshi (Extreme Energy-desity Research Institute, Nagaoka University of Technology)
- 발행 : 2005.08.18