Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.08a
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- Pages.126-126
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- 2005
Deposition of SiC films with single source for MEMS applications
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Nam, S.H.
(Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
;
- Hyun, J.S. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Park, J.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
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Boo, J.H.
(Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2005.08.18
Abstract
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