Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.08a
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- Pages.117-117
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- 2005
The effect of activation annealing on dopant activation and damage recovery for the fabrication of LTPS-TFTs
- Jin, Beop-Jong (Department of Materials Science and Engineering, Hongik University) ;
- Hong, Won-Eui (Department of Materials Science and Engineering, Hongik University) ;
- Ro, Jae-Sang (Department of Materials Science and Engineering, Hongik University)
- Published : 2005.08.18
Abstract
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