한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2005년도 제29회 학술발표회 초록집
- /
- Pages.91-91
- /
- 2005
Si nano dots growth using pulse-type gas feeding with $Si_{2}H_{6}$ in LPCVD
- Park, Chan (Department of Nano Science & Technology, University of Seoul) ;
- Jung, Soon-Jae (Department of Nano Science & Technology, University of Seoul) ;
- Kim, Kyoung-Min (Department of Nano Science & Technology, University of Seoul) ;
- Han, Moon-Sup (Department of physics, University of Seoul) ;
- Sok, Jung-Hyun (Department of Nano Science & Technology, University of Seoul) ;
- Park, Kyoung-Wan (Department of Nano Science & Technology, University of Seoul)
- 발행 : 2005.08.18