Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.02a
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- Pages.103-103
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- 2005
Inductive coupled plasma chemical vapor deposition system for $SiN_{x}$ :H passivation layer of top-emitting organic light-emitting diodes
- Kim, Myeong-Su (Samsung SDI Core Technology Lab.) ;
- Kim, Han-Gi (Samsung SDI Core Technology Lab.) ;
- Lee, Gyu-Seong (Samsung SDI Core Technology Lab.) ;
- Heo, Myeong-Su (Samsung SDI Core Technology Lab.) ;
- Jeong, Seok-Heon (Samsung SDI Core Technology Lab.) ;
- Kim, Gwang-Il (Samsung SDI Core Technology Lab.) ;
- Han, Dong-Won (AMOLED Business Team, Mobile Display H/Q) ;
- Gwon, Jang-Hyeok (AMOLED Business Team, Mobile Display H/Q)
- Published : 2005.02.15
Abstract
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