Proceedings of the Korean Society of Marine Engineers Conference (한국마린엔지니어링학회:학술대회논문집)
- 2005.06a
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- Pages.1016-1021
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- 2005
Development of a Micro-pressure Sensor with high-resisting Pressure for Military Applications
군수용 고내압을 가지는 마이크로 압력센서의 개발
- Published : 2005.06.26
Abstract
A piezoresistive pressure sensor using a silicone rubber membrane has been fabricated on the selectively diffused (100)-oriented n/n+/n silicon substrates by a unique silicon micromachining technique using porous silicon ething. The width, length and thickness of the beam were 120