Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.05a
- /
- Pages.69-71
- /
- 2005
Preparation of AZO thin film using bottom electrode of display with substrate temperature
기판온도 변화에 따른 디스플레이 하부 전극용 AZO 박막의 제작
- Kim, Kyung-Hwan (Kyungwon Uni.) ;
- Cho, Bum-Jin (Kyungwon Uni.) ;
- Keum, Min-Jong (Kyungwon Uni.) ;
- Son, In-Hwan (Shinsung college.)
- Published : 2005.05.13
Abstract
In this study, Al doped ZnO(AZO)thin film were prepared on glass substrates by FTS(Facing targets Sputtering) system. We investigated electrical.. optical and structural properties of AZO thin film under the substrate temperature of the R.T.