Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
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- Pages.578-580
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- 2005
A Simulation of the Mean energy of electrons in $SF_6$ -Ar Mixtures Gas
시뮬레이션을 이용한 $SF_6$ -Ar혼합기체의 전자 평균에너지
Abstract
Energy distribution function for electrons in SF6-Ar mixtures gas used by MCS-BEq algorithm has been analysed over the E/N range 30~300[Td] by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2[%] and 0.5[%]