Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
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- Pages.550-551
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- 2005
Development of Global Simulator of $O_2$ Discharge in High Density Transformer Coupled Plasma Source
고밀도 유도결합 플라즈마 장치의 $O_2$ 방전에 대한 공간 평균 시뮬레이터 제작
- Kim, Hyung-Yong (Chungbuk National University) ;
- Yoon, Nam-Sik (Chungbuk National University) ;
- Kwon, Deuk-Chul (Chungbuk National University) ;
- Kim, Jeong-Hyung (Korea Research Insitute of Standards and Science) ;
- Jeong, Kwang-Hwa (Korea Research Insitute of Standards and Science) ;
- Sin, Yong-Hyun (Korea Research Insitute of Standards and Science)
- Published : 2005.07.07
Abstract
고밀도 유도결합 플라즈마 장치의