Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
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- Pages.151-152
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- 2005
Influence of annealing on the properties of ZnO/MgO films
ZnO/MgO 막의 열처리에 따른 물성 변화
- Choi, Mu-Hee ;
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Ma, Tae-Young
(Gyeongsang National University)
- Published : 2005.07.07
Abstract
ZnO films were deposited on MgO substrates (ZnO/MgO) by ultrasonic spray pyrolysis. Substrate temperature varied from