Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
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- Pages.91-91
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- 2005
Electron energy distribution functions in an inductively coupled a-based plasma
Cl-based 유도결합 플라즈마의 전자에너지 분포함수
- Kim, Gwan-Ha (ChungAng Univ.) ;
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Kim, Chang-Il
(ChungAng Univ.) ;
- Kim, Dong-Pyo (KDG ENGINEERING CO. LTD.) ;
- Kang, Young-Rog (KDG ENGINEERING CO. LTD.)
- Published : 2005.07.07
Abstract
Electron energy distribution functions and plasma parameters such as electron temperature (