한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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- Pages.665-667
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- 2005
Field Enhanced Rapid Thermal Process for Low Temperature Poly-Si TFTs Fabrications
- Kim, Hyoung-June (Viatron Technologies Corp. R&D center) ;
- Shin, Dong-Hoon (Viatron Technologies Corp. R&D center)
- 발행 : 2005.07.19
초록
VIATRON TECHNOLOGIES has developed FE-RTP system that enables LTPS LCD and AMOLED manufacturers to produce poly-Si films at low cost, high throughput, and high yield. The system employs sequential heat treatment methods using temperature control and rapid thermal processor modules. The temperature control modules provide exceptionally uniform heating and cooling of the glass substrates to within
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