Evaluation of the Surface Anchoring Strength by Means of Renormalized Transmission Spectroscopic Ellipsometry

  • Kimura, Munehiro (Dept. of Electrical Engineering, Nagaoka University of Technology) ;
  • Tanaka, Norihiko (Dept. of Electrical Engineering, Nagaoka University of Technology) ;
  • Bansho, Ryota (Dept. of Electrical Engineering, Nagaoka University of Technology) ;
  • Akahane, Tadashi (Dept. of Electrical Engineering, Nagaoka University of Technology)
  • 발행 : 2005.07.19

초록

Evaluating methods of the polar and/or azimuthal anchoring strength coefficients by means of the renormalized transmission spectroscopic ellipsometry are demonstrated. The Anchoring strength coefficients can be evaluated from the measurement of ellipsometric parameters measured by the oblique incident transmission ellipsometry, where the effect of multiplebeam interference is eliminated. The device parameters such as the pretilt angle and cell gap can be determined simultaneously even in the case of the twisted nematic liquid crystal sample cells.

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