한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2005년도 하계학술발표회
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- Pages.76-77
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- 2005
안정화된 간섭계와 FFT 방식을 이용한 93 nm 두께 참조 계단 형상 측정
Profile Measurement of Reference Step with 93 nm Thickness by Using Stabilized Interferometer and FFT Method
- Zhen, Liu (Dept. of Applied Photonic Eng.) ;
- Kim, Hyeon-Su (Dept. of Photonic Eng., Chosun Univ.) ;
- Park, Jong-Rak (Dept. of Photonic Eng., Chosun Univ.) ;
- Kim, Jin-Tae (Dept. of Photonic Eng., Chosun Univ.)
- 발행 : 2005.07.14