한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 춘계학술대회 논문집
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- Pages.1210-1213
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- 2005
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- 2005-8446(pISSN)
열전대를 이용한 미세 열유속 센서의 제작 및 평가
Fabrication and evaluation of a micro heat flux sensor using thermopile
- Kim Jung-Hoon (Mechanical Eng. Yonsei University) ;
-
Kim Bum-Seok
(Mechanical Eng. Yonsei University)
;
-
Cho Hyung-Hee
(Mechanical Eng. Yonsei University)
;
-
Kim Yong-Jun
(Mechanical Eng. Yonsei University)
- 발행 : 2005.06.01
초록
Micro heat flux sensor is used in various industries to measure heat flux. In this study, a micro heat flux sensor is fabricated using the MEMS (Micro Electro Mechanical Systems) techniques. The fabricated sensor is composed in thermopile for sensor and SU-8 for thermal resistance layer. The new method of fabrication SU-8 is proposed in this study. The sensitivity is