Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
- /
- Pages.1194-1197
- /
- 2005
- /
- 2005-8446(pISSN)
Machining of The Micro Nozzle Using Focused Ion Beam
집속이온빔을 이용한 마이크로 노즐의 제작
- Kim G.H. (School of Mechanical Engineering, Yonsei University) ;
-
Min B.K.
(School of Mechanical Engineering, Yonsei University)
;
-
Lee S.J.
(School of Mechanical Engineering, Yonsei University)
;
- Park C.W. (Department of Engineering, Korea Polytechnic University) ;
-
Lee J.H.
(Department of Engineering, Korea Polytechnic University)
- 김규환 (연세대학교 기계공학부) ;
-
민병권
(연세대학교 기계공학부)
;
-
이상조
(연세대학교 기계공학부)
;
- 박철우 (한국산업기술대학교 기계공학과) ;
-
이종항
(한국산업기술대학교 기계공학과)
- Published : 2005.06.01
Abstract
Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.