미소유체 이송용 압전펌프를 위한 시트형 체크밸브의 동특성에 관한 연구

A study on dynamic characteristics of sheet type check valves in PZT pump for small liquid delivery

In precision machinery systems for medical and chemical applications, micropumps with a low pulsation have been demanded and investigated for accurate delivery of a small amount of liquid. This study proposes sheet type check valves instead of ball type check valves for PZT pumps and performs some tests on dynamics characteristics of check valves having different design parameter with variable frequency. The selected materials of check valves is NBR, PP film, Polyimide and Stainless steel(SUS304). In the experiment, dynamic characteristics of stainless steel thin plate have better performance than others.