Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
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- Pages.769-772
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- 2005
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- 2005-8446(pISSN)
Compensation of Five DOF Motion Errors in a Ultra Precision Hydrostatic Table Using the Active Controlled Capillaries
능동제어모세관을 이용한 초정밀 유정압테이블의 5 자유도 운동 오차 보정
Abstract
Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16
Keywords
- 5DOF motion error;
- Compensation;
- Hydrostatic table;
- Active controlled capillary;
- Sequential two point method
- 5 자유도 운동오차;
- 보정;
- 유정압테이블;
- 능동제어모세관;
- 축차 2 점법;