마이크로 구조물에 대한 물성 측정에서의 Size effect 고찰

Study on the size effect of the mechanical property measurement of microstructures

Purpose of this study is to investigate the size-dependent mechanical properties in micron scale medium. Theories such as the couple stress theory and strain gradient theory explain that the deformation in the micron scale is dependent upon the size of the medium. Specimens of the cantilever type, bridge type and paddle type beam that have thickness of 900, 1000 and 1200 nm and width of 10, 20, 30 and $50{\mu}m$ were fabricated by the MEMS technique. We carried out the bending and torsion test to measure the mechanical properties such as the young's modulus, yield strength and torsional rigidity using the AFM(Atomic Force Microscopy).