Technology Trend on Innovation of Control System by IT-fusion and Implementation of Nano-level Accuracy for Nano Control Systems

제어 시스템의 IT 융합을 통한 성능 향상과 나노 정밀도 구현 기술 동향

In order to implement nano-level accuracy of precision equipments, a nano control system is one of the key components. The control system consists of a controller, actuators and sensors having nano-level resolution. In this paper, application area and technical trend on the nano control system are introduced. Some required techniques for realizing nano-level resolution of a controller or actuator are presented. Technical innovation of a control system by IT-fusion and its effect are also described. Finally, domestic research activities for development of the IT-based nano control system are introduced.