Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
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- Pages.240-245
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- 2005
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- 2005-8446(pISSN)
Technology Trend on Innovation of Control System by IT-fusion and Implementation of Nano-level Accuracy for Nano Control Systems
제어 시스템의 IT 융합을 통한 성능 향상과 나노 정밀도 구현 기술 동향
Abstract
In order to implement nano-level accuracy of precision equipments, a nano control system is one of the key components. The control system consists of a controller, actuators and sensors having nano-level resolution. In this paper, application area and technical trend on the nano control system are introduced. Some required techniques for realizing nano-level resolution of a controller or actuator are presented. Technical innovation of a control system by IT-fusion and its effect are also described. Finally, domestic research activities for development of the IT-based nano control system are introduced.
Keywords