한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)

한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Aerosol deposition Method for Fabrication of Nano Crystal Ceramic Layer - Novel ceramics coating with collision of fine powder at room temperature -

  • Akedo Jun (National Institute of Advanced Industrial Science and Technology)
  • 발행 : 2005.06.01
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초록

Consolidation of ceramic particles at room temperature. Reduction of crystallite size and formation of nano-crystalline. Applicable to Integrate functionalceramic materials with metals and Si structure and to fabricate MEMS devises

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