Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
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- Pages.29-54
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- 2005
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- 2005-8446(pISSN)
Aerosol deposition Method for Fabrication of Nano Crystal Ceramic Layer - Novel ceramics coating with collision of fine powder at room temperature -
Abstract
Consolidation of ceramic particles at room temperature. Reduction of crystallite size and formation of nano-crystalline. Applicable to Integrate functionalceramic materials with metals and Si structure and to fabricate MEMS devises
Keywords