원자간력 현미경의 측정면적 확대를 위한 영상정합 알고리즘 개발

Development of Image Matching Algorithm to Expand Measuring Area of Atomic Force Microscope

This paper introduces a correlation-based surface matching algorithm that can be used to reconstruct the surface topography of an object that is scanned from multiple overlapping regions by an AFM. The image matching technique is applied to two neighboring images intentionally overlapped with each other. To account for the inaccuracy of the coarse stage implemented in AFM, all the six axes including the rotational degrees of freedom are successively matched to maximize the correlation coefficient. The results show that the proposed 6-axes image matching method is useful for expanding the measurement range of AFM.