한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 추계학술대회 논문집
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- Pages.208-211
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- 2005
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- 2005-8446(pISSN)
층밀림 간섭계를 이용한 부피간섭계의 개선
Improvement of the Volumetric Interferometer using a Lateral Shearing Interferometer
초록
The volumetric interferometer, which uses the interference of wavefronts emitted from two single mode fibers, measures the target position in 3-D. In this paper, we suggest a new calculation method which doesn't need a non-linear optimization and an initial guess. We find the relationship between the coefficients of the Zernike polynomials for a spherical wavefront and its center and reconstruct a spherical wavefront by using the Zernike polynomials from two interference fringes like a lateral shearing interferometer. The target position can be obtained from the coefficients of the Zernike polynomials of the reconstructed wavefront. We can get the target position in 3-D with
키워드