복합가공기용 리니어 모터 시스템의 제어 연구

A Study on the Control of a Linear Motor System of the Universal Machining Center

Though the technology on the ultra-precise machining has been developed intensively, the high speed and high precision for large machining range is still very hard to achieve. The linear motor system fur the universal machining center is proper fur high speed and high precision, but it has drawback of sensitivity to disturbance. In this research, two degrees of freedom controller based on the zero phase error tracking controller (ZPETC) and disturbance observer are proposed to improve the tracking performance and dynamic stiffness of linear motor system. The proposed controller is verified in simulations and experiments on a nano-positioner system, and the experimental result shows that the tracking performance improved. In addition, the PID optimization method is proposed for the commercialized controller such as the PMAC based system. The tracking as well as impedance is included in the cost function of optimization.