한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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- Pages.264-266
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- 2005
PM OLED 디바이스 제작을 위한 PLD 공정 개발에 관한 연구
A Study on Development of PLD Process for PM OLED Device Manufacture
- 이의식 (순천향대학교 정보기술공학부) ;
- 이병욱 (순천향대학교 정보기술공학부) ;
-
김창교
(순천향대학교 정보기술공학부) ;
- 홍진수 (순천향대학교 정보물리공학부) ;
- 박성훈 (순천향대학교 정보물리공학부) ;
- 문순권 (순천향대학교 정보물리공학부)
- Lee, Eui-Sik (Soonchunhyang Univ) ;
- Lee, Byoung-Wook (Soonchunhyang Univ) ;
-
Kim, Chang-Kyo
(Soonchunhyang Univ) ;
- Hong, Jin-Su (Soonchunhyang Univ) ;
- Park, Sung-Hoon (Soonchunhyang Univ) ;
- Moon, Soon-Kwun (Soonchunhyang Univ)
- 발행 : 2005.11.10
초록
Manufacture of OLED device used thermal evaporation method. However thermal evaporation method has many defect as thermal damage of substrate, difficult of dopant rate control and low utilization of organic materials. so we suggest PLD(Pulsed Laser Deposition) method that solution of these problems. PLD method has many advantage as without thermal damage, easy indicate of deposition rate per one pulse and good utilization of organic materials. In this paper we apply the PLD method for manufacture of device so we present high efficiency device manufacture using PLD method that has good deposition uniformity, surface rough and deposition rate.