Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
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- Pages.113-114
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- 2005
Optical Properties of ZnO Films Grown by Pulsed Laser Deposition
펄스 레이저 증착법으로 성장된 ZnO 막의 광학 특성
Abstract
We present the effect of substrate temperature on the structural and optical properties of ZnO films grown on sapphire substrate by pulsed laser deposition. Growing at higher substrate temperature results in an increase in the surface roughness. The optimum c-axis orientation of the ZnO films occurs at the substrate temperature of 700