Nanoporous Alumina and Macroporous Si Templates for Nanotube Capacitors

  • Shaislamov, U.A. (Kumoh National Institute of Technology, Department of Materials Science and Engineering) ;
  • Seo, B.I. (Kumoh National Institute of Technology, Department of Materials Science and Engineering) ;
  • Lee, S.J. (Kumoh National Institute of Technology, Department of Materials Science and Engineering) ;
  • Kim, S.W. (Kumoh National Institute of Technology, Department of Materials Science and Engineering) ;
  • Hong, S.K. (Hynix Semiconductor Inc., Memory R & D Division, New Device Team) ;
  • Yang, B. (Kumoh National Institute of Technology, Department of Materials Science and Engineering)
  • Published : 2005.11.10