Structural Analysis of N-doped $Ge_2Sb_2Te_5$ Material for Phase Change Memory by Transmission Electron Microscopy
- Park, Ju-Cheol ;
- Park, Jong-Bong ;
- Lee, Jang-Ho ;
- Park, Gyeong-Su ;
- Ho, Ri-Lee ;
- Park, Sun-O ;
- Go, Gwan-Hyeop ;
- Jeong, Hong-Sik
- 박주철 (삼성종합기술원 Analytical Engineering Center) ;
- 박종봉 (삼성종합기술원 Analytical Engineering Center) ;
- 이장호 (삼성종합기술원 Analytical Engineering Center) ;
- 박경수 (삼성종합기술원 Analytical Engineering Center) ;
- 호리이 (삼성전자 Memory Division) ;
- 박순오 (삼성전자 Memory Division) ;
- 고관협 (삼성전자 Memory Division) ;
- 정홍식 (삼성전자 Memory Division)
- Published : 2005.05.01
Abstract
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