Electron Beam Projection Nanopatterning using Crystalline Lattice Image
- Kim, Ki-Bum (School of Materials Science and Engineering, Seoul National University) ;
- Kim, Byung-Sung (School of Materials Science and Engineering, Seoul National University) ;
- Lee, Hyo-Sung (School of Materials Science and Engineering, Seoul National University) ;
- Wi, Jung-Sub (School of Materials Science and Engineering, Seoul National University) ;
- Jin, Kyung-Bae (School of Materials Science and Engineering, Seoul National University) ;
- Kim, Hyun-Mi (School of Materials Science and Engineering, Seoul National University)
- Published : 2005.05.01
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