대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

자계 분포 변화에 따른 OLED용 Al 박막의 제작

Preparation of Al Thin Film with Magnetic Field Distribution

  • 김현웅 (경원대학교 전기공학과) ;
  • 조범진 (경원대학교 전기공학과) ;
  • 금민종 (경원대학교 전기공학과) ;
  • 김경환 (경원대학교 전기공학과)
  • 발행 : 2005.11.04
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초록

The Al electrode for OLED was prepared by Facing Targets Sputtering(FTS) system which can reduce the damage of organic layer. The Al thin films were deposited on the cell (Lif/EML/HTL/Bottom electrode : ITO) for examination the current-voltage properties of OLED with magnetic field distribution between two faced targets. Thickness and current-voltage properties of Al thin films are measured by ${\alpha}-step$ and semiconductor parameter analyzer (HP4156A), respectively.

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