대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.62-64
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- 2005
타겟간 거리 변화에 따른 OLED용 ITO 박막의 제작
Preparation of ITO Thin Film with Distance of Between Two Targets
- Kim, Hyun-Woong (Electrical Engineering, KyungWon Univertisty) ;
- Keum, Min-Jong (Electrical Engineering, KyungWon Univertisty) ;
- Kim, Kyung-Hwan (Electrical Engineering, KyungWon Univertisty)
- 발행 : 2005.11.04
초록
Indium Tim Oxide(ITO) thin film was prepared for TOLEDs by Facing Targets Sputtering(FTS) apparatus which can suppress the damage of organic layer due to the collisions of high energetic particles. In particular, ITO thin film was prepared with changing the distance between two targets for reduced the bombardment by high energetic particles such as
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