Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

2005.11a
/
Pages.230.2-230.2
/
2005

The Korean Society of Mechanical Engineers (대한기계학회)

권호 표지

Vaper-Phase Self-Assembled Monolayer for Anti-Stiction in Nanoimprint Lithography

나노임프린트를 위한 기상자기조립단분자 점착방지막 연구

Noh JungHyun (KIMM) ;
Lim Hyuneui (KIMM) ;
Kim Wan-Doo (KIMM) ;
Choi Dae-Geun (KIMM) ;
Jeong Jun-Ho (KIMM) ;
Lee Eung-Sug (KIMM)

Published : 2005.11.01

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