Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2005.11a
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- Pages.61.2-61.2
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- 2005
Internal now Analysis in a Chamber-Type Inspection Machine subject to Air Flow from the Top
상부로부터 공기가 유입되는 챔버형 검사 장비의 내부 유동해석
- Lee, Hyung-Sik (PRISM Co., Ltd.) ;
- Ham, Byoung-Chul (PhotonDynamics) ;
- Lee, Sang-Ho (WonKwang Univ)
- Published : 2005.11.01
Abstract
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