한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2005년도 추계 학술대회
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- Pages.160-164
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- 2005
Experimental Analysis of the Effect of integrated MEMS inductor on the 5GHz VCO performance
- Lee, Joon-Yeop (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Kim, Ji-Hyuk (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Moon, Sung-Soo (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Kim, Hyeon-Chul (School of Electrical Engineering and Computer Science, Seoul National University) ;
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Chun, Kuk-Jin
(School of Electrical Engineering and Computer Science, Seoul National University)
- 발행 : 2005.09.01
초록
In this paper, MEMS inductor was integrated on a 5GHz VCO using BCB as low-k dielectric layer for MEMS inductor. The VCO core circuit is realized by IBM SiGe process. We varied the spiral inductor's suspension height and posit ion on circuit, and studied their circuit interference effect on VCO performance. The VCO with inductor placed on BCB with More height and the VCO with inductor that was not positioned above active area showed better characteristics.
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