나노위치제어용 선형 모터의 거동 분석

The equipments in semi-conductor, display and measurement fields require high precision and resolution positioning technology. High positioning control can be carried out by using linear motors with little vibration, backlash and friction. In this paper, the acceleration patterns of the moving Part are analyzed to obtain the optimum pattern which leads to the less vibration reduction of equipment. In addition, the effect of friction force in guide rail on position control accuracy is investigated to identify possibility of using current bearing system for nano-positioning control.