한국신재생에너지학회:학술대회논문집
- 한국신재생에너지학회 2005년도 춘계학술대회
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- Pages.154-159
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- 2005
Structure, Optical and Electrical Properties of AI-doped ZnO Thin Film Grown in Hydrogen-Incorporated Sputtering Gas
- Kim, Kyoo-Ho (Yeungnam University) ;
- Wibowo, Rachmat Adhi (Yeungnam University) ;
- Munir, Badrul (Yeungnam University)
- 발행 : 2005.06.01
초록
Low RF power density was used for preparing transparent conducting AI-doped ZnO (AZO) thin films by RF Magnetron Sputtering on Corning 1737 glass. The dependence of films' structural, optical and electrical properties on sputtering gas, film's thickness and substrate temperature were investigated. Low percent of incorporated H2 in Ar sputtering gas has proven to reduce film's resistivity and sheet resistance as low as