Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)
- 2005.05a
- /
- Pages.225-228
- /
- 2005
Effect of Deformation Energy on the Indentation Induced Etch Hillock
변형 에너지가 나노압입 유기 Hillock 현상에 미치는 영향
- Published : 2005.05.01
Abstract
The purpose of this study is to investigate effects of the plastic/elastic deformation energy on wet etching characterization on the surface of material by using the nanoindentation and HF wet etching technique. Indents were made on the surface of Pyrex 7740 glass by the hyperfine indentation process with a Berkovich diamond indenter, and they were etched in